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MOTOR CURRENT ENDPOINT DETECTION SYSTEM
The Motor Current EDS is a multi-channel process control and monitoring system designed exclusively for use on Strasbaugh's nTegrity (6DS-SP) CMP Systems.
SUPERIOR PROCESS CONTROL
By stopping the polish cycle at the precise point, Strasbaugh's Motor Current EDS provides consistent run-to-run stability and process control.
MULTIPLE APPLICATIONS
Motor Current EDS provides superior process results for:
Copper patterned
Tungsten plug
Aluminum CMP
AVAILABLE TODAY
Motor Current EDS is available today for all of Strasbaugh's nTegrity (6DS-SP) CMP Systems.
OVERVIEW
For each wafer processed, Motor Current EDS can be utilized to monitor critical process parameters, including:
Spindle motor current
Table motor current
Spindle downforce
Polish pad temperature
PROCESS OPTIMIZATION
Comprehensive measurement collection significantly increases accuracy of readings: rather than estimating, MC Endpoint allows users to pinpoint precise changes in layer densities.
REAL TIME MEASUREMENT
Motor Current EDS provides higher accuracy and reliability, ensuring better process results.
IN SITU MEASUREMENT
Reduces process uniformity defects.
INSTANTANEOUS MEASUREMENT
Critical for measurement reliability and robustness.
INSTANTANEOUS RESPONSE
nTegrity (6DS-SP) CMP Systems respond to Motor Current EDS software requests within milliseconds.
PREDICTIVE MAINTENANCE
Advanced software diagnoses when minute changes in current indicate the need for recalibration of system components or other facility adjustments.
To request more information on Strasbaugh's Motor Current EDS, click here | 
