Single Wafer, Wax Mount Silicon Prime Wafer Polishing Equipment for Higher Yields

Strasbaugh's nFinity® Wax Mount Polisher (model 6DZ) boasts a design specifically engineered for polishing prime silicon wafers. The nFinity platform maximizes polishing results with consistency, reliability, and ease of operation. nFinity Benefits High Yield; Low Cost of Ownership Automated Step for Both Stock and Finish Polishing Production-Proven with Consistent Wafer-to-Wafer Results Reliable Performance with Unsurpassed MTBF Cassette-to-Cassette Automated Wafer Handling Innovative Wax Mount Technology Seals Wafer Backside Single Wafer Processing Yields Excellent TTV and STIR Available in 2 or 3 Polish Table Configurations Intuitive touch screen GUI Advanced Polishing Technology The nFinity consists of three major mechanical components (rough polisher, finish polisher and mounting area), all housed within a protective enclosure. This wax-mount polisher features a superior mechanical design and utilizes a PC-based computer for machine and process control functions. The combined benefits of an intuitive control system and machine configuration allow uninterrupted cassette to cassette wax mount wafer polishing. The results: a consistent, controllable process providing superior results and higher yield. Wax Mount Technology The nFinity's unique wax mount technology provides a flat, rigid reference for the wafer during polishing, and seals the backside of the wafer, protecting it from scratches, stains and other defects. Single Wafer Processing Consistency Designed for single wafers to be mounted on individual polishing blocks, the nFinity utilizes an automated wax-application and wafer-mounting process that ensures a consistent wax thickness. The block temperature is identical at the beginning of each polish cycle, and the polishing block shape can also be modified during polishing to further control the process.   For more informatin on Strasbaugh's nFinity Wax Mount Wafer Polisher, click here.