Strasbaugh's First Prime Wafer Polisher Was Invented in 1970

Introduction Strasbaugh’s offers two silicon polishers, a wax-mount and a free-mount system, designed for high-volume production. Both polishers provide superior process performance, resulting in higher yields.   The 6DZ Single-Wafer, Wax-Mount Polisher, is the industry’s only fully-automated, wax-mount, silicon wafer polishing system for prime wafer polishing. The STB P300 Silicon Polisher is particularly effective for final haze removal.     Key 6DZ Technologies Innovative wax mount technology Cassette-to-cassette automated wafer handling Single wafer polishing for superior flatness Intuitive touch screen GUI Key STB P300 Technologies ViPRR and membrane wafer carriers improve TTV and reduce edge exclusion Defectivity controls reduce contamination and improve yield Reduced wafer handling further enhances yield Applications 300mm final haze polishing 125mm, 150mm, & 200mm prime wafer final polishing Wafer Sizes 100mm to 300mm Notched, flatted, and round wafers accommodated Products STB P300™ 300mm Silicon Polisher 6DZ 200mm Wax-Mount Silicon Wafer Polisher